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Nitrogen trifluoride Electronic Gases NF3

Nitrogen trifluoride is a colorless and toxic gas with a musty smell under normal temperature and pressure. It has strong oxidizing ability, reacts violently with hydrogen, butter, oil, organic matter and many other substances and can burn. Nitrogen trifluoride is a low-toxic substance, but it can strongly irritate the eyes, skin and mucous membranes of the respiratory tract, and corrode tissues.
Availability:
Quantity:
  • 7783-54-2

  • OEM/ODM

Technical Indicators

Components/Impurities

Nitrogen trifluoride/3.0N

Nitrogen trifluoride/4.0N

Nitrogen trifluoride/4.5N

Nitrogen trifluoride content NF3

99.9%

99.99%

99.995%

carbon tetrafluoride CF4

≤500ppm

≤40ppm

≤20ppm

Oxygen O2 + Argon Ar

≤50ppm

≤5.0ppm

≤3.0ppm

nitrogen N2

≤50ppm

≤5.0ppm

≤5.0ppm

carbon monoxide CO

≤10ppm

≤5.0ppm

≤0.5ppm

carbon dioxide CO2

≤10ppm

≤5.0ppm

≤1.0ppm

Acid (as HF)

≤1.0ppm

≤1.0ppm

≤1.0ppm

Water H2O

≤1.0ppm

≤1.0ppm

≤1.0ppm

Sulfur hexafluoride SF6

≤25ppm

≤2.0ppm

≤1.0ppm

Nitrous oxide N2O

≤10ppm

≤5.0ppm

≤1.0ppm


The Packing

Type of cylinder

Gas pressure

Gas volume

High purity carbon dioxide

47L cylinder

About 10MPa

7.5m3

22kg

43.3L DOT cylinder

About 10MPa

6.8m3

20kg

Cylinder interface: QF-11/CGA660/JISS720


Transport information

Transportation information

Chemical symbol

NF3

CAS No.

7783-54-2

Canadian Shipping Classification

toxic gas

DOT tags

toxic gas

Danger level

2.3

Substance Identification (S) No.

2451

UN No.

UN 2451

Main hazards

poisonous

Toxicity (TLV)

2.5mg/m3


Physical properties

Physical properties

Chemical name

NF3

Molar mass

71.002

Gas density (-129℃, 101.325kPa)

1540kg/m3

Relative density (20℃, 101.325KPa, air=1)

2.46

Gas-liquid volume ratio (15℃, 100kPa)

520L/L

Critical temperature

-39.3℃

Critical pressure

4530kPa

Critical density

522kg/m3

Compression factor

Heat of fusion (-206.79℃, 101.325kPa)

5.61kJ/kg

Heat of vaporization (-129℃, 101.325kPa)

163.29kJ/kg

Specific heat capacity (25℃, 101.33kPa)

Cp=751.68J/(kg • K)

Vapor pressure (-171℃)

1.333kPa

(-100℃)

470kPa

(-60℃)

2200kPa

Viscosity (101.325kPa, 0℃)

0.0183mPa • S

Refractive index (gas, 25℃)

1.0004416


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